Amorphous silicon oxynitride powders have been obtained by pyrolysis of polysiloxazane in a stream of anhydrous NH3 at the temperature up to 1000℃. The polysiloxazane is fabricated from ammonolysis of chloropolysiloxane that is produced by the hydrolysis of silicon tetrachloride. The conversion of polysiloxazane to silicon oxynitride and the structural features of the final powders have also been studied by infrared spectra, elemental composition and X-ray diffraction analysis and SEM observation.
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