用脉冲偏压电弧离子镀技术在玻璃基片上制备均匀透明的氧化钛薄膜,通过改变脉冲偏压幅值,考察其对氧化钛薄膜性能的影响.结果表明,沉积态薄膜为非晶态;脉冲偏压对薄膜性能有明显的影响.随偏压的增加,薄膜厚度、硬度和弹性模量均先增大后减小,前者峰值出现在-100～200V负偏压范围,后两者则在-150～250V范围;-300V偏压时的薄膜硬度最高;达到原子级表面光滑度,RRMSs为0.113 nm,薄膜折射率也最高,在λn=550 nm达到已有报道的最高值2.51,此时薄膜具有最好的综合性能.文中对脉冲偏压对薄膜性能的影响机理也进行了分析.
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