提出利用红外热像实时监测系统,实时获得在YBCO高温超导薄膜上H3PO4腐蚀浅液层的红外灰度数值分布,并以浅液层热交换简化模型为基础,通过归一化红外灰度标准差值表征YBCO高温超导薄膜表面粗糙度的变化.理论分析与实验结果均表明,由归一化红外灰度标准差值的变化曲线,可以清楚展现YBCO高温超导薄膜表面粗糙度增大、减小以及趋于平缓的3个阶段,并能直接获得每个阶段所对应的时间.在本实验条件下,表面粗糙度在8 s时达到最大值,然后逐渐下降,到40 s时开始趋于稳定.浅液层条件下的YBCO高温超导薄膜表面粗糙度的成功观测,是一个重要的阶段目标,为最终解决YBCO高温超导薄膜湿法刻蚀中粗糙度的实时监测难题奠定了良好基础.
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