为了提高纳米压印的成型质量,采用粗粒化分子动力学方法,研究纳米压印中抗蚀剂的变形行为.计算模型包括线宽结构的硅模具,聚甲基丙烯酸甲酯(PMMA)聚合物薄膜以及硅基板.模型的x,y方向采用周期性边界条件,z方向采用非周期性边界条件.分析不同压印条件下,模具所需要的压印力及不同区域抗蚀剂密度的变化.结果表明,随着模具槽宽的增大,压印温度的上升,在下压过程中所需要的压印力逐渐减小;在脱模初始阶段,模具和抗蚀剂之间的相互作用力出现阶跃式的递减;下压阶段,抗蚀剂局部密度增加;脱模阶段,抗蚀剂出现回弹现象.
参考文献
| [1] | 李世泽,魏正英,杜军,唐一平.微压印中抗蚀剂填充行为研究[J].西安交通大学学报,2013(09):126-133. |
| [2] | Z.K. Peng;Peter W. Tse;F.L. Chu .A comparison study of improved Hilbert-Huang transform and wavelet transform: Application to fault diagnosis for rolling bearing[J].Mechanical Systems & Signal Processing,2005(5):974-988. |
| [3] | Dumond, J.J.;Mahabadi, K.A.;Yee, Y.S.;Tan, C.;Fuh, J.Y.H.;Lee, H.P.;Low, H.Y. .High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography[J].Nanotechnology,2012(48):485310-1-485310-9. |
| [4] | Larson, RG .Principles for coarse-graining polymer molecules in simulations of polymer fluid mechanics[J].Molecular physics,2004(4):341-351. |
| [5] | Gautieri, Alfonso;Vesentini, Simone;Redaelli, Alberto .How to predict diffusion of medium-sized molecules in polymer matrices. From atomistic to coarse grain simulations[J].Journal of molecular modeling,2010(12):1845-1851. |
| [6] | Young Seok Woo;Dong Eon Lee;Woo Il Lee .Molecular Dynamic Studies on Deformation of Polymer Resist During Thermal Nano Imprint Lithographic Process[J].Tribology letters,2009(3):209-222. |
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