Ti(CxN1-x)涂层具有硬度大、强度高、耐磨等性能,而目前采用化学气相沉积法在不锈钢表面制备Ti(CxN1-x)多层涂层的报道较少.用高温化学气相沉积法在316L不锈钢表面分别制备了TiN单层涂层和TiC/Ti(CxN1-x)/TiN多层涂层,比较分析了2种涂层的显微形貌、相结构、硬度、界面结合力及耐磨性能.结果表明:TiC/Ti(CxN1-x)/TiN多层涂层结构致密,厚约10 μm;TiN单层及TiC/Ti(CxN1-x)/TiN多层涂层均提高了316L不锈钢的硬度、耐磨性;与TiN单层涂层相比,TiC/Ti(CxN1-x)/TiN多层涂层的显微硬度和界面结合力更好,摩擦系数更低,磨损量更小,耐磨减摩性能更好;2种涂层的磨损破坏机制较一致,主要为磨粒磨损和摩擦氧化.
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