介绍了一种基于热学知识设计的表面薄膜微型MEMS皮拉尼计，并将其用于圆片级真空封装腔体的真空度测量中。为了设计灵敏度较高的皮拉尼计，对不同结构的皮拉尼计的热量分布进行了数值计算与分析，并最终完成了加工。此皮拉尼计的结构和加工工艺比较简单，能用于一般的MEMS真空封装中。实验结果显示该皮拉尼计可以测量1-10^5Pa的真空度，并在1-1000Pa内有很好的线性度。
A surface micro MEMS Pirani gauge based on heat transfer principle was introduced, which can be used for measuring vacuum pressure inside vacuum packaging in wafer level. In order to design a high sensitivity Pirani gauge, numerical evaluation and analysis were carried out with different structures, and the fabrication according to the analysis was conducted. Because of simplified processes and structure, this Pirani gauge can be used in general vacuum packaging. The experimental results show that the Pirani gauge is capable of measuring pressures from atmospheric value to 1 Pa and has a good linearity in the range from 1 Pa to 1000 Pa.
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