采用基于密度泛函理论的平面波赝势方法,研究了具有置换型界面的Ti-Si-N的结构、弹性常数及热力学性质.在计算热力学性质时,先计算一组不同晶格常数下的Ti-Si-N的声子谱及相应的静态总能,由此得到不同晶格常数下的自由能；再由准谐近似及自由能极小判据得到自由能与温度的关系,进而计算热膨胀系数、定容摩尔热容及定压摩尔热容与温度的关系.计算结果说明制备Ti-Si-N及类似薄膜时,要选择合适的基底、温度等条件.
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