以工业纯钛板作为阳极,在Ba(OH)2溶液中微弧氧化制得BaTiO3薄膜.研究了BaTiO3薄膜的表面形貌和物相组成,着重研究了退火处理对BaTiO3薄膜物相的影响.微弧氧化所得薄膜表面凹凸不平,且存在大量分布不均的孔洞,主要由六方相BaTiO3组成,经不同温度退火后,其物相组成发生很大变化.在1 100℃下退火1h后,薄膜中开始出现四方相BaTiO3;随着热处理温度的升高和保温时间的延长,更多的BaTiO3由六方相向四方相转变.但高温退火过程中基体Ti与微弧氧化膜反应形成的氧化物层会影响薄膜的铁电性能.
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