硅基MEMS器件最主要的问题是硅具有低的机械和摩擦性能,限制了其在弯折和运动MEMS器件中的应用.超纳米金刚石薄膜优异的机械、化学惰性、热稳定性、摩擦磨损性能使其成为能长期可靠运行的理想MEMS元件材料.阐述了微波化学气相沉积和Ar、CH4为主的超纳米金刚石薄膜的制备及其机理,综述了超纳米金刚石薄膜与MEMS相关性能及在微摩擦磨损、残余应力方面的研究现状,介绍了超纳米金刚石薄膜覆形沉积、选择性生长和光刻图形化等微加工技术及其在MEMS上的应用研究进展.
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