Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

材料科学技术（英文）, 2015, 31(1): 37-42.

Zhenyu Wang ^1, , Dong Zhang ^2, , Peiling Ke ^3, , Xincai Liu ^4, , Aiying Wang ^5,

2.Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences, Ningbo 315201, China

3.Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences, Ningbo 315201, China

4.Faculty of Materials Science and Chemical Engineering, Ningbo University, Ningbo 315201, China

5.Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences, Ningbo 315201, China

基金项目: This work was financially supported by the program of National Natural Science Foundation of China (Grant No.51375475) and the Instrument Developing Project of the Chinese Academy of Sciences (Grant No.YZ201326).

Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

Keywords： TiN

参考文献

[1]	P.H. Mayrhofer;F. Kunc;J. Musil .A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1/2):151-159.
[2]	V. Uvarov;I. Popov .Metrological characterization of X-ray diffraction methods for determination of crystallite size in nano-scale materials[J].Materials Characterization,2007(10):883-891.
[3]	T. Takahashi;K. Masugata;H. Kawai;S. Kontani;J. Yamamoto .Surface morphology of TiN films reactively deposited by bias sputtering[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2000(2/3):777-784.
[4]	H. Ichimura;A. Rodrigo .The correlation of scratch adhesion with composite hardness for TiN coatings[J].Surface & Coatings Technology,2000(2/3):152-158.

上一张下一张

计量

下载量()
访问量()

作者相关

在本站搜索
Zhenyu Wang Dong Zhang Peiling Ke Xincai Liu Aiying Wang
在百度学术搜索
Zhenyu Wang Dong Zhang Peiling Ke Xincai Liu Aiying Wang
在万方数据库搜索
Zhenyu Wang Dong Zhang Peiling Ke Xincai Liu Aiying Wang
在CNKI搜索
Zhenyu Wang Dong Zhang Peiling Ke Xincai Liu Aiying Wang

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网

Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

参考文献