采用离心辅助微模塑方法,制备了Fe-Ni合金微流道.着重考察了分散剂含量和pH值对浆料分散性的影响,结果表明当分散剂含量为1.5 wt％和pH=4时,Fe-Ni乙醇基浆料的分散性最好.用聚二甲基硅氧烷(PDMS)复制带有微结构的原始硅模板,在PDMS弹性模上采用离心注模方法进行浆料的微成形.最终制备出微结构完整、表面无裂纹、致密的Fe-Ni合金微流道,其最大线性收缩率为12.7％,致密度为97.3％,说明离心辅助微模塑法是一种可行的微器件制备方法.
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