STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS

金属学报(英文版), 2002, 15(2): 203-206.

^1, , ^2,

1.Guangzhou Institute of Energy Conversion,The Chinese Academy of Sciences,Guangzhou 510070,China

2.Guangzhou Institute of Energy Conversion,The Chinese Academy of Sciences,Guangzhou 510070,China

基金项目: 中国科学院"百人计划"

STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS

Ni-Cr System solar selective thin solid films were prepared by d.c. magnetron reactivesputtering under the atmosphere of O2 and N2. Ni-Cr alloy was chosen as targetmaterial and copper sheets as substrate. Using SEM, Spectrophotometer and Talystepto analyze the relations between the selective characteristic and the structure, theformation and the thickness of the thin films. The aim is to obtain good solar selectivethin films with high absorptance and low emittance, which is applied to flat plate solarheat collectors.

参考文献

[1]	I Hotovy;J Huran;V Breternitz;L Spiess,G Teichert,J Schawohl.43rd International Scientific Colloquium[C].Technical University of Ilmenau,1998
[2]	曹韫真,胡行方.磁控反应溅射Ni-Cr选择性吸收薄膜[J].太阳能学报,1999(03):274-278.
[3]	X J Yang;Z Q Yin;Y Y Shi .[J].太阳能学报,1997,18(01):7.
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STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS

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