采用直流反应磁控溅射方法在ITO导电玻璃上沉积了WO_3薄膜,研究了靶基距对其微结构和电致变色性能的影响,利用XRD、SEM和XPS对薄膜的微结构和成分进行了表征.通过可见光透射谱对样品的电致变色性能进行了研究,并且讨论了WO_3薄膜电致变色性能与其微结构、价态变化之间的关系.发现靶基距为7cm的情况下沉积得到的WO_3薄膜呈非晶态,薄膜有更多的孔隙,有利于Li~+的抽取,进而显示出较好的电致变色性能.反应溅射制备的WO_3薄膜中W是W~(6+)价态,颜色为透明状,当发生着色反应时,随着薄膜中Li~+成分增加,薄膜颜色变为蓝色,薄膜中W原子为W~(6+)和W~(5+)的混合价态.认为其电致变色的行为是由于Li~+和e~-在薄膜中的注入和拉出引起的W~(6+)和W~(5+)发生转化所致.
Tungsten oxide films were deposited on ITO coated glass substrates by reactive DC magnetron sputtering.The electrochromic (EC) properties of the films were studied with different target-substrates distance in the deposition process.The WO_3 films were characterized with X-ray diffraction (XRD),X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM).The electrochromic properties and mechanism were discussed by means of spectrophotometry.It indicates that the samples are amorphous and have more pores that are beneficial for Li~+ to inject and eject from the film.The original-state films are composed of tungsten and oxygen,and tungsten ions are W~(6+).After electrochemical reactions,the main component becomes Li_xWO_3 in which tungsten ions normally exhibit both W~(6+) and W~(5+).The films exhibited cathodic electrochromism.The coloration and bleaching of the WO_3 film is associated with insertion and deinsertion of Li~+ ions and electrons in the films.
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