用金属有机物沉积(MOD)法在LaAlO3(100)单晶基底上制备了立方钙钛矿型导电缓冲层La0.4Sr0.6CoO3(LaSrCoO)薄膜.根据热分析曲线确定前驱膜的热处理工艺,其中前驱膜的热分解温度为620~800℃,涂膜的结晶温度为825℃.由X射线衍射(XRD)分析可知,热处理后涂膜的主相是LaSrCoO,其择优取向为<100>;另外还有La2CO5和LaC003等杂相.由φ扫描和(100)极图可知,所制各的涂膜有较强双轴织构.用标准四引线法测量了涂膜的室温和低温电阻率,在77K时达到1.04×10-4Ω·m,实现了沉积导电缓冲层的目的.
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