采用热CVD方法直接在平面硅基底上成功地制备出定向碳纳米管薄膜。在反应中,镍过渡金属作为催化剂,碳氢化合物乙炔作为碳源,研究了催化剂薄膜厚度对高温氨气预处理后单晶硅衬底上沉积的催化剂镍膜的纳米结构形貌和所生长的定向碳纳米管薄膜等的影响规律。通过扫描电子显微镜（SEM）观察表明,高温刻蚀后,纳米镍颗粒的平均直径一定程度上取决于薄膜的原始厚度,且颗粒密度也取决于薄膜原始厚度,由于氨气的介入,厚为5～10 nm的镍催化剂薄膜具有高的颗粒数密度;碳纳米管的直径随催化剂薄膜厚度单调增大,而其长度随催化剂厚度的增加先增加后减少,且其定向程度随催化剂厚度的增加是先增强后减弱。
Aligned multi-walled carbon nanotubes（CNTs） were synthesized on Ni-deposited Si substrate via pyrolysis of C2H2 using thermal chemical vapor deposition（CVD） technique at 900 ℃.The influence of catalyst nickel（Ni） thin film thickness on its morphology after pretreatment in ammonia and growth of aligned CNTs was investigated by means of scanning electron microscopy（FESEM）.The results show that the average diameter of Ni nanoparticles and the particles density depended on the original thickness of the nickel films in some degree.High density by particles number is obtained for the film thickness of about 5-10 nm after pretreatment in ammonia.Carbon nanotube diameter increases monotonically with film thickness,and its length and orientational degree increases firstly,and then decreases as the film thickness increases.
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