薄膜材料的热导率一般与其相应的块体材料有较大的差异.由于其厚度较小,对块体材料热导率的测试方法一般不适用于薄膜材料,因此近几十年来,研究工作者们发明了很多新的用于薄膜热导率的测试方法.综述了薄膜热导率的一些常用测试方法,着重介绍了薄膜热导率的最新测试方法的特点及其适用范围,并针对广泛使用的3ω法进行了详细介绍.
The thermal conductivity of thin solid films is different from their bulk material s. Because of their very small size in thickness, the measurement methods for bulk materials are not suitable for thin film materials. Many new methods have been developed to measure the thermal conductivity of the thin films in recent decades. In this paper, the measurement methods for thin film thermal conductivity are reviewed, the characteristics and application area of the latest measurement are presented,and the 3-omega method, which is widely used in the measurement of the thin solid films, is introduced in detail.
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