采用溶胶-凝胶法制备了La0.75Ca0.25MnO3多晶靶材,并用紫外脉冲激光沉积法(PLD)在LaAlO3(100)单晶衬底上制备了La0.75Ca0.25MnO3外延薄膜.采用XRD测试了薄膜的晶体结构和生长取向,测试了薄膜(200)衍射峰摇摆曲线并分析了薄膜的结晶质量.利用原子力显微镜(AFM)表征了薄膜表面形貌,并利用四探针法测试了薄膜的电阻-温度(R-T)曲线.实验结果显示薄膜结晶质量较好,并沿c轴择优生长,且生长方式为层状生长.薄膜的绝缘体-金属转变温度(T1M)达到270 K以上,电阻温度系数(TCR)高达10％.
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