The structural and surface properties of high-quality epitaxial cubic MgxZn1 -xO films deposited by pulsed laser deposition (PLD) were studied by X-ray diffraction and atomic force microscopy respectively. For films of about 500nm thick, scans over a 30μm × 30μm area revealed a surface roughness Rα of about 100nm. This relatively large surface roughness is primarily attributed to the particulate and outgrowth during the PLD process. A good epitaxial growth on LaAlO3 (LAO) (100) substrates, however has been obtained for composition x = 0.9, 0.7 and0.5 with the heteroepitaxial relationship of (100)MgxZn1-xO∥(100)LAO (out-of-plane) and (011 ) MgxZn1-xO∥ (010)LAO (in-plane). These structural qualities suggest that cubic MgxZn1-xO alloys films have good potential in a variety of optoelectronic device applications.
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