采用磁控溅射方法制备了Ti膜及TiMo、TiMoYAl和TiZrYAl等三种合金膜. 合金膜中Mo、Zr和Al三种元素成份与靶材成分基本一致, 而Y元素则与靶材成分有较大的偏差. 在400℃吸氢工艺下, 四种膜材的吸氢动力学性能良好, 没有脱膜现象, 饱和吸氢量均可超过1.5(H/M). 膜材的吸氢PCT曲线表明, 含Mo合金膜材具有最高的吸氢平衡压, 外推出的室温下的数量级约为10$^{-4}$Pa.
The magnetron sputtering method was used to prepare Ti-base alloy films. The concentration of the alloy elements such as Mo, Zr and Al in the films is consistent with that in the targets, while the Y concentration has a large deviation from that in the targets. The hydrogen absorption dynamics of the four films at 673 K is fine and the TiZrYAl film has the best hydriding activity. The hydrogen storage capacities of all the four films exceed 1.5 (H/M). The hydrogen absorption P--C isotherms of the films were measured. The films alloying with Mo have the highest hydrogen absorption equilibrium pressure, which is determined as about 10$^{-4}$ Pa at ambient temperature.
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