采用水基凝胶流延工艺制备四方多晶氧化锆薄膜,确定合理的烧成制度,并考察薄膜的显微结构与烧结性能.结果表明,水基凝胶流延成型的氧化锆薄膜坯体结构均匀,其烧成过程可以将排胶和烧结过程一次完成,不需要单独的排胶过程,这大幅度简化了坯体的烧成工艺过程,同时坯片经1733 K保温6 h可获得结构致密的四方多晶氧化锆薄膜.
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