采用超声波-脉冲直流电沉积的方法在钼基底上制备了两种不同叠层结构的Cu/In预制膜:Cu/In多层膜和Cu/In双层膜,经过随后的热处理得到了Cu/In合金膜.通过XRD、SEM等对比研究了这两种Cu/In预制膜热处理前后的表面形貌、成分和相结构特征.结果表明:采用Cu/In多层膜制备的Cu/In合金膜表面更致密、平滑,成分分布更均匀,所用的热处理时间短且显著减少了In元素的挥发损失,更利于薄膜原子比的精确控制.
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