采用脉冲激光沉积技术（PLD）在LaAlO3（100）单晶衬底上外延生长YBa2Cu3O7-δ-Y2O3多层薄膜，用X射线衍射技术（XRD）分析薄膜的物相结构和外延特性，通过原子力显微镜（AFM）观察薄膜的表面形貌．本文主要研究了最佳工艺参数下交替生长多层YBCO-Y2O3膜的超导性能．结果表明，WBa2Cu3O7-δ-Y2O3薄膜为纯c轴取向外延生长，临界电流密度Jc（H=0或H／／C）均高于纯YBCO薄膜，纳米Y2O3起到磁通钉扎中心作用．
The WBa2Cu3O7-δ-Y2O3 multi-layer film wered deposited by pulsed laser deposition（PLD） technique on LaAIO3 （100） substrates. X-ray diffraction was employed to characterize the phase structure and in-plane alignment. The surface morphology was evaluated in AFM. We studied the superconducting performance under the best processing parameter of the multi-layer film. The results showed that WBa2Cu3O7-δ-Y2O3 thin film c-axis oriented epitaxial growth had higher critical current density Jc than pure YBCO thin film（both in H=0 and H//c）. The nanoparticles of Y2O3 worked as the artifical pinning centers for quantized vortices.
参考文献
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