采用溶胶-凝胶法制备CuxZn1-xO薄膜,用X射线衍射仪、原子力显微镜、紫外-可见分光光度计和荧光光谱仪研究薄膜的微结构、表面形貌、透射谱和光致发光谱,结果表明:薄膜均呈六角纤锌矿结构,随着Cu含量增加,薄膜平均晶粒尺寸先增大后减小,表面RMS粗糙度先减小后增大,紫外吸收边发生蓝移,薄膜在可见光波段范围内的平均透过率在80％左右.未掺杂ZnO薄膜中出现一个相对较弱紫光发射带和一个很强的绿光发射带,其它薄膜中出现一个紫光发射和一个蓝光发射带;紫光发射归因于导带以下的局域能级与价带之间的电子跃迁,绿光发射来自于氧空位缺陷能级与价带之间的电子跃迁.
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