采用磁控溅射结合酸腐蚀法制备掺铝氧化锌透明导电氧化物薄膜,研究关键溅射工艺参数对AZO薄膜腐蚀后性能的影响.研究发现,在较低沉积温度和较大溅射压强条件下,样品腐蚀后可以形成粗糙度和雾度更大的表面形貌,有利于提高电池性能；而溅射功率增加,虽然能提升样品腐蚀后的粗糙度,但雾度的增加则呈现饱和趋势.将具有优良光电性能、不同雾度的AZO薄膜作为前电极制备非晶/微晶硅薄膜双结太阳能电池,发现雾度越大,电池的短路电流密度越大,特别是底电池电流密度越大,从而电池的光电转换效率也获得提高.这一发现有助于通过优化溅射工艺参数来改进AZO薄膜表面形貌和电池性能.
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