Diamond-like carbon (DLC) films have been deposited on glass substrates using radio-frequency (rf) plasma deposition method, γ-ray, ultraviolet (UV) ray were used toirradiate the DLC films. Raman spectroscopy and infrared (IR) spectroscopy were usedto characterize the changing characteristics of SP3 C-H bond and hydrogen content inthe films due to the irradiations. The results show that, the damage degrees induced bythe UV ray on the SP3 C-H bonds are much stronger than that by the γ-ray. When theirradiation dose of γ-ray reaches 10× 104Gy, the SP3 C-H bond reduces about 50% innumber. The square electrical resistance of the films is reduced due to the irradiationof UV ray and this is caused by severe oxidation of the films. By using the results onoptical gap of the films and the fully constrained network theory, the hydrogen contentin the as-deposited films is estimated to be 10-25at.%.
参考文献
| [1] | 梁风,严学俭.类金刚石薄膜的性质、应用及制备[J].物理学报,1999(06):1095-1102. |
| [2] | G A Liu;T M Wang;Y Z Wang .[J].材料导报,2000,14:28. |
| [3] | 王天民,王维洁,韩培刚,黄良甫,罗崇泰.用高能H+束辐照类金刚石碳膜的研究[J].物理学报,1992(02):276-281. |
| [4] | S H Lin;G H Liu .[J].Materials Science Progress,1987,1(01):13. |
| [5] | M Yoshikawa;G Katagiri;H Ishida;T Akamatsu .[J].Applied Physics Letters,1988,52:1639. |
| [6] | H C Barshilia;S Sah;B R Mehta;V D Vankar,D K Avasthi,Jaipal,G K Mehta .[J].THIN SOLID FILMS,1995,258:123. |
| [7] | Y H Cheng;Y P Wu;J G Chen;D Q Xu,X L Qiao,C S Xie .[J].Surface and Coatings Technology,1999(111):141. |
| [8] | K C Xu.Excel Value Method and the Application in chemistry[M].Press of Lanzhou University,2000:124. |
| [9] | M H Kim;J Y Lee .[J].Journal of Materials Science,1991(26):4787. |
| [10] | B Dischler;A Bubenzer;P Koidl .[J].Solid State communications,1983(48):105. |
| [11] | F Sato;N Saito;Y Hirano;A H Jayatissa K Takizawa S Kawado T Kato H Sugiyama Y Kagoshima M Ando .[J].Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films,1998,A16:2553. |
| [12] | B Dischler;A Bubenzer;P Koidl .[J].Applied Physics Letters,1983,42:636. |
| [13] | G Compagnini;G Foti;R Reitano;G Mondo .[J].Applied Physics Letters,1990,57:2546. |
| [14] | G Compagnini;L Calcagno;G Foti .[J].Physical Review Letters,1992,69(03):454. |
| [15] | C A John;J Frank .[J].Journal of Vacuum Science and Technology A,1988,A6:1778. |
| [16] | D P Liu;F Li;S J Yu;T C Ma .[J].Materials Science and Technology,2000,8(08):58. |
| [17] | 刘贵昂,谢二庆,王天民.γ射线辐照对类金刚石薄膜结构与特性的影响[J].功能材料,2001(03):266-268. |
| [18] | D K Avasthi .[J].真空,1996,47:1249. |
| [19] | Y Ishikawa;H Yoshimi;Y Hirose .[J].Japanese Journal of Applied Physics,1995(34):L1609. |
| [20] | D W Chen;Y X Liu;X Y Qi .[J].Journal of Functional Materials,1999,30(05):492. |
| [21] | M Zhang;Y Nakayama .[J].Journal of Applied Physics,1997,82(10):4912. |
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