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  4. 磁控溅射TiAlN涂层抗氧化性能的研究进展

材料导报, 2013, 27(21): 14-18.

磁控溅射TiAlN涂层抗氧化性能的研究进展

张贝贝 1, , 张程煜 2, , 折洁 3, , 乔生儒 4,

1.西北工业大学超高温结构复合材料重点实验室,西安710072

2.西北工业大学超高温结构复合材料重点实验室,西安710072

3.西北工业大学超高温结构复合材料重点实验室,西安710072

4.西北工业大学超高温结构复合材料重点实验室,西安710072

基金项目:   国家自然科学基金面上项目(50702045)   高等学校博士学科点专项科研基金(20070699007)  

关键词： 磁控溅射 , TiAlN涂层 , 氧化机理 , 工艺参数 , 抗氧化性 , 过渡族元素 , 多元多层

Recent Progresses in Oxidation Resistance of TiAlN Coatings by Magnetron Sputtering

ZHANG Beibei 1, , ZHANG Chengyu 2, , SHE Jie 3, , QIAO Shengru 4,

1.西北工业大学超高温结构复合材料重点实验室,西安710072

2.西北工业大学超高温结构复合材料重点实验室,西安710072

3.西北工业大学超高温结构复合材料重点实验室,西安710072

4.西北工业大学超高温结构复合材料重点实验室,西安710072

Keywords： magnetron sputtering , TiAlN coatings , oxidation mechanism , processing parameters , oxidation resistance , transition elements , multi-element-layer

简述了TiAlN涂层的应用领域、氧化机理以及采用磁控溅射制备该涂层的方法,分析了制备过程中N2分压、Al靶功率以及基体温度对涂层抗氧化性能的影响规律.同时指出了致密、膜基结合力高的涂层具有较高的抗氧化性;加入其他合适元素和合理设计过渡层不仅可以提高涂层与基体的物理匹配程度,减小内应力,同时也可提高膜基结合力,改善涂层的热力学稳定性及抗氧化性能,将成为今后的研究趋势.

参考文献

[1] Y.C. Chim;X.Z. Ding;X.T. Zeng;S. Zhang .Oxidation resistance of TiN, CrN, TiAIN and CrAIN coatings deposited by lateral rotating cathode arc[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2009(17):4845-4849.
[2] Zhu, L.;Hu, M.;Ni, W.;Liu, Y. .High temperature oxidation behavior of Ti _(0.5)Al _(0.5)N coating and Ti _(0.5)Al _(0.4)Si _(0.1)N coating[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2012(12):1795-1799.
[3] Chen, L.;Wang, S.Q.;Du, Y.;Zhou, S.Z.;Gang, T.;Fen, J.C.;Chang, K.K.;Li, Y.W.;Xiong, X. .Machining performance of Ti-Al-Si-N coated inserts[J].Surface & Coatings Technology,2010(2):582-586.
[4] Du M;Hao L;Liu X P et al.Microstructure and thermal stability of Ti1-x Alx N coatings deposited by reactive magnetron co-sputtering[J].Phys Procedia,2011,18:222.
[5] J.C. Oliveira;A. Manaia;A. Cavaleiro .Hard amorphous Ti-Al-N coatings deposited by sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(15):5032-5038.
[6] Cheng-Hsun Hsu;Chien-Chih Lee;Wei-Yu Ho .Filter effects on the wear and corrosion behaviors of arc deposited (Ti,Al)N coatings for application on cold-work tool steel[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(15):4826-4832.
[7] 赵立新,郑立允,牛兰芹,赵树国,王丽平.TiA1N镀层硬质合金结构及性能研究[J].金属热处理,2008(07):16-19.
[8] Bouzakis, KD;Skordaris, G;Gerardis, S;Katirtzoglou, G;Makrimallakis, S;Pappa, M;Lill, E;M'Saoubi, R .Ambient and elevated temperature properties of TiN, TiAlN and TiSiN PVD films and their impact on the cutting performance of coated carbide tools[J].Surface & Coatings Technology,2009(6/7):1061-1065.
[9] Bouzakis K D;Klocke F;Skordaris G et al.Influence of dry micro-blasting grain quality on wear behavior of TiAlN coated tools[J].Wear,2011,271(5-6):783.
[10] 曹华伟;张程煜;乔生儒 等.X12CrMoWVNbN10-1-1耐热钢表面电弧离子镀TiAlN涂层及其热震性能[J].稀有金属材料与工程,2012,41(z2):353.
[11] 罗飞,何欣,杨会生,高克玮,王燕斌.溅射工艺对TiAlN薄膜摩擦学性能的影响[J].航空材料学报,2007(02):33-36.
[12] 张勇 .TiAlN硬质薄膜抗氧化性能研究[D].西华大学,2010.
[13] 霍红英,邹敏,张勇.氧化温度对TiAlN薄膜成分的影响[J].表面技术,2011(05):48-50.
[14] Man BY;Guzman L;Miotello A;Adami M .Microstructure, oxidation and H-2-permeation resistance of TiAlN films deposited by DC magnetron sputtering technique[J].Surface & Coatings Technology,2004(0):9-14.
[15] 李佳,夏长清,刘昌斌,戴晓元.Al含量对（Ti,Al）N涂层结构性能的影响[J].材料导报,2003(12):29-31,35.
[16] 陈利 .Ti-Al-N基硬质涂层的热稳定性能、微结构及其力学、切削性能的研究[D].中南大学,2009.
[17] Bhagchandani R K;Bangari R S;Mehra D et al.High temperature oxidation behavior of nanostructured AlCrN and TiAlN coated Inconel 718 Substrate[J].Int J Sci Teclm Res,2012,3(02):205.
[18] Qi Z B;Sun P;Zhu F P et al.Relationship between tribological properties and oxidation behavior of Ti0.34 Al0.66 N coatings at elevated temperature up to 900 ℃[J].Surface and Coatings Technology,2012,231:267.
[19] 王永康,熊仁章,李炳生,雷廷权,夏立芳.Al对Ti1-xAlxN涂层高温氧化动力学的影响[J].宁波大学学报(理工版),2002(03):39-41.
[20] Mcintyre D;Greene J E;Hakansson G et al.Oxidation of metastable single-phase polycrystalline Ti0.5 Al0.5 N films:Knetics and mechanisms[J].Journal of Applied Physics,1990,67(03):1542.
[21] Keunecke, M.;Stein, C.;Bewilogua, K.;Koelker, W.;Kassel, D.;den Berg, H.V. .Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering[J].Surface & Coatings Technology,2010(5):1273-1278.
[22] Jeong JJ.;Hwang SK.;Lee CM. .Nitrogen flow rate dependence of the growth morphology of TiAlN films deposited by reactive sputtering[J].Surface & Coatings Technology,2002(0):82-85.
[23] J.T.Chen;J. Wang;F. Zhang .Characterization and temperature controlling property of TiAlN coatings deposited by reactive magnetron co-sputtering[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2009(1/2):91-96.
[24] Chakrabarti K.;Jeong JJ.;Hwang SK.;Yoo YC.;Lee CM. .Effects of nitrogen flow rates on the growth morphology of TiA1N films prepared by an rf-reactive sputtering technique[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1/2):159-163.
[25] Zhao W J;Mei F H;Dong Y S et al.AlxTi1-xN hard coatings synthesized by reactive sputtering using mosaic target[J].Journal of Materials Processing Technology,2006,176(1-3):179.
[26] 刘宇,刘波,刘胜利.磁控溅射制备TiAlN薄膜组织结构及性能的研究[J].硬质合金,2009(04):218-222.
[27] 王永康,程祥宇,王伟民.基体温度和氮分压对（Ti,Al）N涂层性能的影响[J].稀有金属材料与工程,1994(03):55-58.
[28] 曹守娟 .双靶直流反应磁控共溅射沉积TiAlN薄膜及其性能研究[D].东北大学,2009.
[29] Barshilia HC;Yogesh K;Rajam KS .Deposition of TiAlN coatings using reactive bipolar-pulsed direct current unbalanced magnetron sputtering[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2008(2):427-434.
[30] 王均涛,刘平,杨丽红,李伟,刘新宽,马凤仓.TiAlN／SiO2纳米多层刀具涂层的微观结构和超硬效应研究[J].中国机械工程,2011(22):2757-2761.
[31] 王均涛,刘平,杨丽红,李伟,刘新宽,马凤仓.TiAlN/AlON纳米多层涂层的微观结构和力学性能研究[J].机械工程学报,2012(04):72-77.
[32] 黄自谦,贺跃辉,蔡海涛,肖逸锋,黄伯云.TiAlN涂层的热残余应力分析[J].中国有色金属学报,2007(06):897-902.
[33] Chen, L.;Wang, S.Q.;Du, Y.;Zhou, S.Z.;Gang, T.;Fen, J.C.;Chang, K.K.;Li, Y.W.;Xiong, X. .Machining performance of Ti-Al-Si-N coated inserts[J].Surface & Coatings Technology,2010(2):582-586.
[34] M. Pfeiler;K. Kutschej;M. Penoy .The effect of increasing V content on structure, mechanical and tribological properties of arc evaporated Ti-Al-V-N coatings[J].International Journal of Refractory Metals & Hard Materials,2009(2):502-506.
[35] 宋庆功,辛慧.磁控溅射TiAlVN薄膜中V含量对其结构和抗腐蚀性能的影响[J].材料保护,2011(02):61-63.
[36] 余东海,王成勇,张凤林.刀具涂层材料研究进展[J].工具技术,2007(06):25-32.
[37] Santana AE.;Karimi A.;Derflinger VH.;Schutze A. .Microstructure and mechanical behavior of TiAlCrN multilayer thin films[J].Surface & Coatings Technology,2004(0):334-340.
[38] Luo Q;Hovsepian PE;Lewis DB;Munz WD;Kok YN;Cockrem J;Bolton M;Farinotti A .Tribological propertie's of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels[J].Surface & Coatings Technology,2005(1/3):39-45.
[39] 辛慧,宋庆功.TiAIN基薄膜抗腐蚀性能的研究进展与展望[J].科技创新导报,2010(03):12-12.
[40] Li CHEN;Yong DU;Fei YIN .Mechanical properties of (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings[J].International Journal of Refractory Metals & Hard Materials,2007(1):72-76.
[41] Andersen K N;Bienk E J;Schweitz K O et al.Deposition,microstructure and mechanical and tribological properties of magnetron sputtered TiN/TiAlN multilayers[J].Surface and Coatings Technology,2000,123(2-3):219.
[42] Barshilia HC;Deepthi B;Rajam KS .Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2006(4):479-488.
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