采用Sol-gel法在普通载玻片上制备YZO薄膜.研究了陈化时间和Y掺杂量对薄膜晶体结构、表面形貌和光学性能的影响,并分析和探讨了工艺参数与结构和性能之间的关系.实验结果表明,YZO薄膜为纤锌矿结构,呈c轴择优取向生长,平均透光率(380～760nm)超过85%.实验还发现,陈化时间存在最优值,YZO薄膜随着Y掺杂量的增加晶体结晶质量下降.
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