材料保护, 2012, 45(6): 43-45.
锌件表面铈盐转化及膜层的耐蚀性
陆鑫 1, , 郭瑞光 2, , 姚倩 3, , 晶硅切割废料的传统回收工艺复杂且高纯硅的分离难度大、回收率低.而将废料提纯后直接制备碳化硅及其复合材料不仅方法简单、有效避开了硅难于分离的问题,且废料利用充分、制品多样化.从利用废料制备碳化硅粉体、碳化硅致密陶瓷、碳化硅多孔陶瓷、碳化硅/氮化硅复合材料、碳化硅基高温红外发射涂料以及碳化硅颗粒增强合金等方面综述了这一方向的研究进展,并基于该领域存在的一些主要问题,对未来的研究提出了几点建议.","authors":[{"authorName":"杨昱桢","id":"2538f79f-601a-4471-b2f2-8ede13cc70bb","originalAuthorName":"杨昱桢"},{"authorName":"向道平","id":"80df76b7-b799-4368-97bd-8cc552745a94","originalAuthorName":"向道平"},{"authorName":"吕鑫禹","id":"c2153d19-bec4-45ae-bb53-10a7fdd50fe0","originalAuthorName":"吕鑫禹"},{"authorName":"丁雷","id":"c6b8da24-183c-4e7f-8435-5d5a2498364f","originalAuthorName":"丁雷"},{"authorName":"潘艳林","id":"45133d7f-dabe-4e1a-911c-551b6becb62d","originalAuthorName":"潘艳林"}],"doi":"10.11896/j.issn.1005-023X.2015.03.010","fpage":"49","id":"b7c99643-4f2d-498e-84c3-dcc9948431eb","issue":"3","journal":{"abbrevTitle":"CLDB","coverImgSrc":"journal/img/cover/CLDB.jpg","id":"8","issnPpub":"1005-023X","publisherId":"CLDB","title":"材料导报"},"keywords":[{"id":"ce09c653-2a31-4024-bf41-57b96fc27a8b","keyword":"晶硅切割废料","originalKeyword":"晶硅切割废料"},{"id":"93a0eeca-c830-4fd2-8471-9539df7cac76","keyword":"碳化硅粉体","originalKeyword":"碳化硅粉体"},{"id":"f2b436bf-8608-46b9-bd91-ee6138d4c076","keyword":"碳化硅多孔陶瓷","originalKeyword":"碳化硅多孔陶瓷"},{"id":"f5a08d9d-8253-4bd3-8937-bdd419a403f2","keyword":"碳化硅复合材料","originalKeyword":"碳化硅复合材料"}],"language":"zh","publisherId":"cldb201503010","title":"晶硅切割废料在碳化硅及其复合材料中的应用进展","volume":"29","year":"2015"},{"abstractinfo":"太阳能级多晶硅切割废料浆主要含高纯硅约30%(质量分数,下同)、碳化硅约35%、聚乙二醇和水约28%和很少量的铁氧化物.综述了国内切割废料的回收情况.在多晶硅的切割过程中,约50%的多晶硅被切磨成高纯硅粉进入到切割废料中而损失.与碳化硅和聚乙二醇相比,切割废料中的高纯硅最有回收价值.我国太阳能级多晶硅绝大多数需要进口,因此如能将切割废料中的高纯硅提取出来,进而用于制备太阳能级多晶硅,不但能实现资源的回收利用,而且可以减少多晶硅的进口,因此重点介绍了当前国外从切割废料中回收高纯硅的研究进展.","authors":[{"authorName":"邢鹏飞","id":"733550e0-edd0-40ec-9c1f-70fa2602cb6a","originalAuthorName":"邢鹏飞"},{"authorName":"赵培余","id":"03ddf9fe-f0e4-4e0f-b2ab-ae4368f19f0e","originalAuthorName":"赵培余"},{"authorName":"郭菁","id":"2514dac7-175c-4772-9a19-a898b8347284","originalAuthorName":"郭菁"},{"authorName":"刘燕","id":"11b9fab0-857a-4f64-96b3-bfb962d75535","originalAuthorName":"刘燕"},{"authorName":"李峰","id":"0bc794d6-bdfe-46e6-9c94-d076c9f63b6c","originalAuthorName":"李峰"},{"authorName":"涂赣峰","id":"0f486899-76ee-4f4d-aeae-92e749c3a823","originalAuthorName":"涂赣峰"}],"doi":"","fpage":"75","id":"ca769526-fbbe-4061-b4c1-68731158d603","issue":"1","journal":{"abbrevTitle":"CLDB","coverImgSrc":"journal/img/cover/CLDB.jpg","id":"8","issnPpub":"1005-023X","publisherId":"CLDB","title":"材料导报"},"keywords":[{"id":"223bb7b3-93d2-433d-8876-cdd497d91813","keyword":"太阳能多晶硅","originalKeyword":"太阳能多晶硅"},{"id":"1a21d3b1-00d8-4ed3-85c5-1e438b6a4210","keyword":"切割废料","originalKeyword":"切割废料"},{"id":"bf2c9246-2301-4c62-b2b0-ec9f247e4027","keyword":"回收","originalKeyword":"回收"},{"id":"c9049b01-cf5c-417d-a308-39f53e104aa8","keyword":"高纯硅","originalKeyword":"高纯硅"},{"id":"11cec1c0-057b-40a4-a96d-6c4284483a7a","keyword":"碳化硅","originalKeyword":"碳化硅"},{"id":"7d0d57ed-b768-4f3c-a996-4df8eaf223b4","keyword":"聚乙二醇","originalKeyword":"聚乙二醇"}],"language":"zh","publisherId":"cldb201101015","title":"太阳能级多晶硅切割废料浆的综合回收","volume":"25","year":"2011"},{"abstractinfo":"太阳能级硅棒在切割生产硅晶片过程中会产生大量的切割废料.概述了废料中切割液和碳化硅回收技术的进展,重点介绍和分析了价值更高的硅与碳化硅微粉分离回收技术的特点度现状,并比较各种方法的优缺点,同时结合自身的课题研究,提出了新的解决思路.分析认为先通过离心、浮选等方法对切割废料初步提纯后再经高温热处理或合金化等方法将其进一步分离,是较有前景的回收技术.","authors":[{"authorName":"李吉超","id":"6511dfd7-68e9-4f6e-ac47-1ebae1e3065a","originalAuthorName":"李吉超"},{"authorName":"黄凯","id":"2ea32430-fe7a-4c19-a971-1d148a96eeae","originalAuthorName":"黄凯"},{"authorName":"储少军","id":"265efc4e-6bd9-425e-b0fd-f596d2b3ce61","originalAuthorName":"储少军"},{"authorName":"朱鸿民","id":"9b1ca970-8433-441d-a9cf-7753d45f3e66","originalAuthorName":"朱鸿民"}],"doi":"","fpage":"123","id":"d2ba10ce-7b1f-403a-b9fc-ea9b9103e776","issue":"19","journal":{"abbrevTitle":"CLDB","coverImgSrc":"journal/img/cover/CLDB.jpg","id":"8","issnPpub":"1005-023X","publisherId":"CLDB","title":"材料导报"},"keywords":[{"id":"ce2b9984-2cd6-42bc-ad79-e89ab20fb50c","keyword":"太刚能级硅","originalKeyword":"太刚能级硅"},{"id":"9a2f3eff-8bae-4e97-b441-bb5ec717afef","keyword":"切割废料","originalKeyword":"切割废料"},{"id":"fe0aa26f-b2eb-47a0-adbf-fd01e1d411db","keyword":"回收利用","originalKeyword":"回收利用"},{"id":"6e4db763-536f-4980-9fae-609e1040e428","keyword":"碳化硅","originalKeyword":"碳化硅"}],"language":"zh","publisherId":"cldb201119026","title":"太阳能级硅切割废料的回收技术","volume":"25","year":"2011"},{"abstractinfo":"从单晶和多晶硅切割废料浆中综合回收高纯硅、聚乙二醇和碳化硅,对减少环境污染、提高资源利用率有一定意义,特别是如能将切割料浆中最有价值的高纯硅得以回收并再用于制造太阳能电池,这对缓解我国太阳能多晶硅的紧缺、减少多晶硅的进口量有重要意义和商业价值.本文简述了单晶硅和多晶硅的生产概况及其切割工艺,重点阐述了国内外切割料浆的回收进展,综合了国内外现有的回收专利技术,将回收工艺概括为固液分离和固体提纯两个主要步骤,并对每个步骤所采用的方法进行了归纳和分类,以供相关企业参考.同时,本文也介绍了国内现有的切割料浆回收企业的概况,以及目前从切割料浆中回收高纯硅的研究进展.","authors":[{"authorName":"邢鹏飞","id":"b80b2006-2b05-4859-aeeb-4450a470c303","originalAuthorName":"邢鹏飞"},{"authorName":"郭菁","id":"ab0e9d71-6ada-4a1b-ab87-565b213f7eb1","originalAuthorName":"郭菁"},{"authorName":"刘燕","id":"1238a384-813e-4f63-8195-e7c9a0ab5c84","originalAuthorName":"刘燕"},{"authorName":"庄艳歆","id":"1b665cec-cad3-465d-9e4a-66b426305a67","originalAuthorName":"庄艳歆"},{"authorName":"涂赣峰","id":"9c8e50dc-bf39-4af1-89e4-0b75f75b6d86","originalAuthorName":"涂赣峰"}],"doi":"10.3969/j.issn.1671-6620.2010.02.016","fpage":"148","id":"d35a1607-ad2d-4ed1-bdfe-d0234b04fd60","issue":"2","journal":{"abbrevTitle":"CLYYJXB","coverImgSrc":"journal/img/cover/CLYYJXB.jpg","id":"17","issnPpub":"1671-6620","publisherId":"CLYYJXB","title":"材料与冶金学报"},"keywords":[{"id":"fa129375-fde9-48f0-a033-aa95e0a0596f","keyword":"单晶硅","originalKeyword":"单晶硅"},{"id":"c4e69c12-3034-4d7c-9dfe-3703c00c9a3a","keyword":"多晶硅","originalKeyword":"多晶硅"},{"id":"f4831599-16d5-4ad3-9308-f9c078cb0aa3","keyword":"切割料浆","originalKeyword":"切割料浆"},{"id":"31626e45-ee49-4693-9abe-f15029e8d249","keyword":"碳化硅","originalKeyword":"碳化硅"},{"id":"ea2c15e5-b73d-473b-872d-93eda7dd0656","keyword":"聚乙二醇","originalKeyword":"聚乙二醇"},{"id":"f889cf6f-c19a-40ab-9067-2ce0ef33eb00","keyword":"高纯硅","originalKeyword":"高纯硅"},{"id":"ed26ab70-44bb-4a44-b787-068c96bee5ca","keyword":"回收","originalKeyword":"回收"}],"language":"zh","publisherId":"clyyjxb201002016","title":"单晶硅和多晶硅切割废料浆的回收","volume":"09","year":"2010"},{"abstractinfo":"多晶硅线切割废料中含有约30%以上的高纯硅粉,若能经济地提纯回收再作为太阳能多晶硅使用,将具有很高的利用价值.深度分离提纯的难点主要集中在两个方面,一是碳化硅碎粒,二是硼、磷杂质.对以上两个方面的分离提纯进展做了评述,指出了今后努力的方向.","authors":[{"authorName":"刘苏宁","id":"a7bdd687-8c8d-4c53-a514-94db3f9796f5","originalAuthorName":"刘苏宁"},{"authorName":"黄凯","id":"2f20830b-1286-4a33-967f-ba30896deb98","originalAuthorName":"黄凯"},{"authorName":"朱鸿民","id":"c89b874d-c080-4cde-8f56-059debd726dc","originalAuthorName":"朱鸿民"}],"doi":"10.3969/j.issn.2095-1744.2017.01.003","fpage":"9","id":"f040fda1-ad3a-4268-84a4-20cd2e9d073f","issue":"1","journal":{"abbrevTitle":"YSJSGC","coverImgSrc":"journal/img/cover/YSJSGC.jpg","id":"76","issnPpub":"2095-1744","publisherId":"YSJSGC","title":"有色金属工程"},"keywords":[{"id":"2b642d32-e4b9-460a-95a6-3eed7f7d8455","keyword":"线切割废料","originalKeyword":"线切割废料"},{"id":"fd2204d2-cee4-4751-8a70-7d15f9c07196","keyword":"硅粉提纯","originalKeyword":"硅粉提纯"},{"id":"15948d65-29a2-44c8-8b12-7127d429337d","keyword":"碳化硅分离","originalKeyword":"碳化硅分离"},{"id":"ad44eeb9-2a63-4afa-a2ce-c5774239f758","keyword":"硼磷脱除","originalKeyword":"硼磷脱除"}],"language":"zh","publisherId":"ysjs201701003","title":"多晶硅线切割废料中硅粉的回收提纯技术进展","volume":"7","year":"2017"},{"abstractinfo":"为提高在切割废料中高纯硅的回收率,对沉降方法和条件进行了优化.根据单/多晶硅切割废料浆的物理、化学性质,在m（水）∶m（聚乙二醇）=（8～9）∶1、含有少量无机盐的水溶液体系中,在不同沉降时间和不同固液配比的条件下进行正交试验,通过盐酸、氢氟酸进行除杂,最后在1 500～1 600℃下进行硅的铸锭.通过X射线衍射、元素分析和粒径分析研究沉降条件对于最终回收产物的影响.研究表明：在固液比为0.06、沉降时间5 h的条件下,沉降并经过除杂得到的微粉中硅质量分数达到88.52%,碳化硅质量分数为11.46%,富集的微粉经铸锭得到的硅锭纯度为98.71%,硅的回收率达到43.33%.","authors":[{"authorName":"郭菁","id":"d443dff7-3b21-43eb-8d2c-14f09f06d6f3","originalAuthorName":"郭菁"},{"authorName":"邢鹏飞","id":"aa053a4a-b731-44a8-a0f4-de5e1bd1dc34","originalAuthorName":"邢鹏飞"},{"authorName":"涂赣峰","id":"3fb035c7-d2a5-493a-be8c-e92c24c24e8c","originalAuthorName":"涂赣峰"},{"authorName":"祁阳","id":"778497e7-2f23-4e13-a112-e0e23fc149b5","originalAuthorName":"祁阳"}],"doi":"","fpage":"103","id":"5f5edd51-06fb-4fe3-90e2-90e8bb57e9a5","issue":"4","journal":{"abbrevTitle":"CLKXYGY","coverImgSrc":"journal/img/cover/CLKXYGY.jpg","id":"14","issnPpub":"1005-0299","publisherId":"CLKXYGY","title":"材料科学与工艺"},"keywords":[{"id":"24f405b6-3fe9-4f05-8bcc-5d6a1287a1ed","keyword":"单晶硅","originalKeyword":"单晶硅"},{"id":"d637fc73-87c3-4ade-bd4c-d6804c595ed2","keyword":"多晶硅","originalKeyword":"多晶硅"},{"id":"eed58ed2-be7d-4eee-ba85-151890d18cf2","keyword":"切割料浆","originalKeyword":"切割料浆"},{"id":"da669357-68ad-4e08-a0b2-ab256c9a946f","keyword":"碳化硅","originalKeyword":"碳化硅"},{"id":"017b121e-ae1d-4210-8c46-27c62f99f1c1","keyword":"聚乙二醇","originalKeyword":"聚乙二醇"},{"id":"065ffd56-c355-43ab-bd90-9e8d5ddec0a2","keyword":"高纯硅","originalKeyword":"高纯硅"},{"id":"5924babd-38bf-4688-8ed4-5a27f7bdd9da","keyword":"回收","originalKeyword":"回收"}],"language":"zh","publisherId":"clkxygy201104021","title":"单晶及多晶硅切割废料中的高纯硅回收","volume":"19","year":"2011"},{"abstractinfo":"利用多晶硅切割废料,采用燃烧合成的方法成功制备了SiC/Si2N2O及SiC/SiAlON复相粉体材料,并以该粉体为辐射基料制备出高温红外发射涂料.研究了原料配比对产物物相组成和微观形貌的影响,讨论了掺人C粉和Al粉的燃烧反应机理.实验结果表明,当反应剂中SiC∶ Si∶C =68∶ 56∶0(质量比)时,合成产物中的Si2N2O含量最大；当反应剂中SiC∶ Si∶C∶Al =68∶ 53∶ 24∶21时,合成产物中的SiAlON含量最高,配制成的高温红外涂料的红外发射率数值最高,在2.5 ～23.5 μm波段范围内达到了0.92.","authors":[{"authorName":"韩林森","id":"c71a85ac-ce3b-4c9e-b965-0a3f6b9dbd65","originalAuthorName":"韩林森"},{"authorName":"杨建辉","id":"8ad58d1f-84d4-4bff-8b1e-2bae40d75bf0","originalAuthorName":"杨建辉"},{"authorName":"李永","id":"c994214f-d049-4e6a-8f94-6b4a30d466a2","originalAuthorName":"李永"},{"authorName":"林志明","id":"cb91a8f1-7636-4f10-a4e9-3b8139adc9bf","originalAuthorName":"林志明"},{"authorName":"李江涛","id":"efd5e103-2c87-4ee8-9c23-73a698fd9c0a","originalAuthorName":"李江涛"}],"doi":"","fpage":"506","id":"fba48e90-1d88-4d3b-a862-8ee7fff5de46","issue":"3","journal":{"abbrevTitle":"GSYTB","coverImgSrc":"journal/img/cover/GSYTB.jpg","id":"36","issnPpub":"1001-1625","publisherId":"GSYTB","title":"硅酸盐通报 "},"keywords":[{"id":"4e8c45cd-e196-4441-81b3-da31518a942b","keyword":"SiC基复相材料","originalKeyword":"SiC基复相材料"},{"id":"95eafe78-50d6-429c-9aad-51bbff4307bf","keyword":"SiC-Si2N2O","originalKeyword":"SiC-Si2N2O"},{"id":"5b96df3a-de14-49cf-85f8-6a741f42fcfe","keyword":"SHS","originalKeyword":"SHS"},{"id":"881d3edc-625c-4e10-9691-47ef92b22e72","keyword":"多晶硅切割废料","originalKeyword":"多晶硅切割废料"}],"language":"zh","publisherId":"gsytb201203002","title":"利用多晶硅切割废料燃烧合成SiC基复相材料","volume":"31","year":"2012"},{"abstractinfo":"以光伏产业晶硅切割废砂浆为主要原料,通过真空碳化法制备了 SiC 粉末。在通过物理和化学方法测定废砂浆组分含量的基础上,确定了初始原料 Si/C 配比。随后,利用 XRD 和 SEM 分别研究了真空热处理温度、无机碳源种类等对所制备粉末的物相和组织的影响,产物粉末的粒径分布范围通过激光粒度仪测试。研究表明,在900~1100℃温度范围,随着反应温度的升高,硅粉与活性炭的碳化反应越来越完全,并在1100℃完全生成了 SiC 粉末。继续升温,X 射线衍射峰的强度逐渐升高,SiC 产物粉末的粒度越来越大。此外,不同碳源在相同条件的碳化反应结果表明,活性炭作为碳源比石墨效果更佳。","authors":[{"authorName":"杨昱桢","id":"b2c1c736-91e7-4e9a-a9da-7f98bf919e5b","originalAuthorName":"杨昱桢"},{"authorName":"向道平","id":"5883e276-77c0-45d4-92f9-5e0e5b2ef2f7","originalAuthorName":"向道平"},{"authorName":"何雨翔","id":"8e0bbda8-f2dd-4c6f-b7d8-d6db17ff176e","originalAuthorName":"何雨翔"}],"doi":"10.11896/j.issn.1005-023X.2015.12.021","fpage":"96","id":"4a4c2b0d-89cd-4f8a-84a6-c3e858f70331","issue":"12","journal":{"abbrevTitle":"CLDB","coverImgSrc":"journal/img/cover/CLDB.jpg","id":"8","issnPpub":"1005-023X","publisherId":"CLDB","title":"材料导报"},"keywords":[{"id":"3c1cc8bf-cf3d-4db9-9c3d-49e9120c232a","keyword":"晶硅废砂浆","originalKeyword":"晶硅废砂浆"},{"id":"0594bd7b-bfc3-4657-b534-8622e5d9d7f4","keyword":"真空碳化","originalKeyword":"真空碳化"},{"id":"a26e5f3f-9dc4-4879-9890-f2183b416195","keyword":"SiC粉末","originalKeyword":"SiC粉末"},{"id":"9b216608-a448-499d-9db0-0507aa962dea","keyword":"XRD","originalKeyword":"XRD"},{"id":"447c3533-2414-470f-82ae-2ed6a70ffcda","keyword":"SEM","originalKeyword":"SEM"}],"language":"zh","publisherId":"cldb201512021","title":"利用晶硅切割废砂浆制备 SiC 粉体?","volume":"","year":"2015"},{"abstractinfo":"本文通过硅片旋转磨损试验模拟线切割过程,以评价切割液的切割性能.首先,通过对比试验选出线切割液的主要组份；接着,通过正交试验优化各组份的含量并得到最优配方；最后,在相同条件下将最优配方与某市场切割液进行比较.结果表明:自制最优配方切割液MRR为7820 nm/min,Ra为9.12 nm.与市场切割液相比MRR稍低,但表面粗糙度要好.分析原因是由于新配方切割液在分散性和润滑性方面有所提高,而且碱性变强,加大了化学作用,有效的提高了晶片表面质量.","authors":[{"authorName":"熊次远","id":"e0962951-e807-439a-95d7-e494ad62da5f","originalAuthorName":"熊次远"},{"authorName":"李庆忠","id":"a0bb6bf4-d907-460c-9fb3-c0d302704716","originalAuthorName":"李庆忠"},{"authorName":"钱善华","id":"7b102ea1-6c33-46c9-a505-9bc6cbe5416c","originalAuthorName":"钱善华"},{"authorName":"闫俊霞","id":"42204534-f63c-4614-bd9a-0a286d483282","originalAuthorName":"闫俊霞"}],"doi":"","fpage":"1726","id":"76c2ccb4-fd07-4d53-ada1-f9fcd0967947","issue":"6","journal":{"abbrevTitle":"RGJTXB","coverImgSrc":"journal/img/cover/RGJTXB.jpg","id":"57","issnPpub":"1000-985X","publisherId":"RGJTXB","title":"人工晶体学报"},"keywords":[{"id":"31d19ded-b43b-460b-acfc-347756facd3c","keyword":"硅片","originalKeyword":"硅片"},{"id":"c6b5434d-f541-4f29-9409-24d1be2b0843","keyword":"多线切割","originalKeyword":"多线切割"},{"id":"2f33a7bf-d876-48b4-af30-544c938bbff4","keyword":"线切割液","originalKeyword":"线切割液"},{"id":"d050250b-7c71-487d-a69e-838d2ee4d45a","keyword":"材料去除率(MRR)","originalKeyword":"材料去除率(MRR)"}],"language":"zh","publisherId":"rgjtxb98201206047","title":"适用于硅晶体多线切割的线切割液研制","volume":"41","year":"2012"},{"abstractinfo":"以晶硅切割废砂浆回收中三级砂为原料,采用化学方法对其组分分离,设计正交实验,研究了液固比、溶液浓度等工艺因素对分离效果的影响,采用XRD和SEM对相组成和微观形貌进行分析,结果表明:采用酸浸渍法除铁,对三级砂的结构和形貌无影响,当液固比为12∶1,盐酸浓度为1.0 mol/L,浸溶温度为50℃,浸溶时间为1h时,除铁效果最佳.进一步采用碱液滴加法除硅,可以实现三级砂中Si和SiC的有效分离,当液固比为12∶1,氢氧化钠质量浓度为12％,反应温度为70℃时,除硅效果最佳.","authors":[{"authorName":"肖雪军","id":"d0b3645c-7bb8-4344-ac6f-c27adb3a9b40","originalAuthorName":"肖雪军"},{"authorName":"唐惠东","id":"a6eee84d-87e4-46ae-b4f9-fb6dd7ca6243","originalAuthorName":"唐惠东"}],"doi":"","fpage":"3504","id":"e83991d3-f672-4ca4-994e-25a593650a49","issue":"12","journal":{"abbrevTitle":"GSYTB","coverImgSrc":"journal/img/cover/GSYTB.jpg","id":"36","issnPpub":"1001-1625","publisherId":"GSYTB","title":"硅酸盐通报 "},"keywords":[{"id":"100cc696-0618-49eb-926c-08f470706487","keyword":"三级砂","originalKeyword":"三级砂"},{"id":"ec8e5653-7596-485f-a849-1aadabf3bd25","keyword":"酸浸渍除铁法","originalKeyword":"酸浸渍除铁法"},{"id":"4e5a049d-07ab-4015-ab05-84228dd6cedf","keyword":"碱液滴加法","originalKeyword":"碱液滴加法"},{"id":"8a736f15-ef20-4de8-a035-b687b8e71e24","keyword":"正交实验","originalKeyword":"正交实验"}],"language":"zh","publisherId":"gsytb201512018","title":"晶硅切割废砂浆回收中三级砂的组分分离研究","volume":"34","year":"2015"}],"totalpage":3787,"totalrecord":37869}