基于非硅微器件材料的特殊性能要求,研究了热处理对氨基磺酸盐镀镍层热稳定性的影响.随热处理温度升高,镍镀层的硬度先缓慢下降,高于300℃后则急剧降低.镍镀层晶粒变粗、晶界减少及受外力作用时易变形是热处理后镍镀层硬度降低的主要原因.热处理温度对镍镀层耐蚀性的影响不显著.热处理温度低于400℃时,镍镀层与Cr/Cu、Ti基的结合强度随热处理温度的升高而显著增强.因此,氨基磺酸盐镀镍层在低于300℃的环境中使用时,其性能基本稳定.
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