采用sol-gel法在Pt/Ti/SiO2/Si衬底上成功制备出纯BiFeO3(BFO)和Ce、V共掺杂Bi0.97 Ce0.03Fe1-x VxO3 (x=0,0.01,0.02,0.03)(BCFVx)薄膜.结构和形貌测试表明,Ce、V共掺杂使得BFO薄膜发生从菱方结构到伪四方结构的转变,且薄膜晶粒变小.介电性能和漏电流测试表明,Ce、V共掺杂BFO薄膜的介电常数增大,介电损耗和漏电流密度减小.铁电性能测试表明在x=0.01时,BCFV0.01薄膜具有较好矩形度的电滞回线,表现出较好的铁电性能.
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