分别采用Tersoff势与S-W势对不同温度下Si(100)面重构情况进行分子动力学模拟,找出了这两种势函数下发生重构的温度范围,进而采用S-W势对几种典型情况进行模拟研究.结果发现,二聚体形成前后的温度、内能会出现明显变化,高温时重构速度快但效果较差且不稳定,会形成吸附单体.原子间距为0.33nm左右是二聚体形成的关键距离.
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