对VO2薄膜进行不同剂量的γ辐照处理,利用SEM和xPS对辐照前后的薄膜进行分析,发现γ辐照诱导V离子出现不同价态之间的转变现象,并且价态变化的程度和方向与辐照剂量有关;较低剂量γ辐照在薄膜表面造成显著损伤,当辐照剂量增大时,γ射线在VO2薄膜中产生退火效应,使薄膜表面质量得到改善.辐照后的VO2薄膜光透射特性测试结果与上述结论相合,对辐照诱导的价态变化和退火效应的机理进行了讨论.
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