采用磁控溅射法在316L不锈钢基体上分别沉积单层Al2O3，膜、单层Au膜以及Al2O3／Au／Al2O3层状薄膜。采用气相渗透法在500℃，氘分压为0．06MPa条件下测试了薄膜的阻氘性能。结果表明，3种薄膜氘渗透后，薄膜的形貌良好，无开裂、无剥落的现象，氘渗透率减低因子均比316L不锈钢基材增大一个数量级以上，阻氘效能按单层Al2O3，膜、单层Au膜以及Al2O3／Au／Al2O3层状薄膜依次递升。Al2O3／Au／Al2O3层状薄膜的优异阻氘效能可归因于，延性的Au夹层使层状薄膜的力学性能得到显著提高；Al2O3层能阻止Au与基体间互扩散，使Au能充分发挥阻氘效能。本研究表明，由贵金属与陶瓷阻氚材料构成的层状薄膜是发展阻氚涂层的新途径。
Single Al2O3 films, single Au films and Al2O3/Au/Al2O3 layered films were prepared on 316L stainless steel substrate by megnetron sputtering. Then vapour phase permeation experiment of deuterium through 316L substrate and its film materials were carried out at 500℃ with a partial pressure of deuterium 0. 06 MPa. The results indicate that morphology of the three films is good and no phenomenon of cracking and spalling is found after deuterium permeation. Deuterium permeation reduction factors （PRF） of these films are over one order of magnitude relative to clean 316L. The performance of barrying deuterium increases progressively in the order of single Al2O3 films, single Au films and Al2O3/Au/Al2O3 ayered films. Al2O3/Au/Al2O3 layered films exhibit excellent performance of barrying deuterium because the mechanical properties of the layered films are improved visibly by the ductile interlayer Au and the interdiffusion between Au and 316L substratc is hindered by Al2O3 layer, so Au can give full play to barry deuterium. The study shows that layered films like precious metal integrated with ceramics is a new way in the domain of tritium permeation barrier development.
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