高温超导薄膜具有良好的物理性能,其微细图形在微电子器件中有非常广泛的应用.概述了高温超导薄膜微细图形的制备工艺及研究进展,重点介绍了高温超导薄膜微细图形制备方法中的光刻法、改性工艺、耐熔微掩膜制备法和Sol-gel法与化学修饰法相结合的基本原理、工艺特点及最新研究进展.首次把Sol-gel法与化学修饰法相结合制备薄膜的微细图形的工艺用于高温超导薄膜微细图形的制备中.
参考文献
| [1] | Hye-RIm Kim;Jungwook Sim;Ok-Bae Hyun .Temperature distribution in SFCLs based on Au/YBCO films during quenches[J].Cryogenics,2006(4):305-311. |
| [2] | Takashi Uchida;Yoshizumi Yasuoka;Katsumi Suzuki .IF properties of YBCO hot-electron bolometer mixers for millimeter-wave radiation[J].Physica C,2002,372-376:387. |
| [3] | Shigetoshi Ohshima .Recent status of microwave applications in Japan and Asia[J].PHYSICA C,2004,412-414:1506. |
| [4] | Tonouchi M;Saijo H .Terahertz radiation from YBCO thin film log-periodic antermas[J].Superconductivity:Incorporating Novel Magnetism,2003,16(05):867. |
| [5] | Igarashi K;Higuchi K;Wakana H;Adachi S;Iwata N;Yamamoto H;Tanabe K .Improvement of ramp fabrication for high-T-c ramp-edge Josephson junction[J].Physica, C. Superconductivity and its applications,2007(0):965-968. |
| [6] | Hye-Rim Kim;Hyo-Sang Choi;Hae-Ryong Lim et al.Resistance of superconducting fault current limiters based on YBa2Cu3O7 thin films after quench completion[J].Physica C,2002,372-376:1606. |
| [7] | Oktem B;Bozbey A;Avci I .The superconducting transition width and illumination wavelength dependence of the response of MgO substrate YBCO transition edge bolometers[J].Physica C,2007,458:6. |
| [8] | Kim SB;Watanabe J;Nanato N;Murase S;Hyun OB .Current density distributions of the meander type resistive fault current limiters[J].Physica, C. Superconductivity and its applications,2006(0):1069-1072. |
| [9] | 康琳;郑延斌 等.高温超导薄膜的一种湿刻技术[J].低温物理学报,1995,17(01):44. |
| [10] | Lam S K H;Sankrithyan B .HTSC devices fabricated by selective epitaxial growth[J].Superconductor Science and Technology,1999,12:215. |
| [11] | Shokoohi F K;Schiavone L M et al.Wet chemical etching of high-temperature superconducting Y-Ba-Cu-O films in ethylenediaminetetraacetic acid[J].Applied Physics Letters,1989,55(25):2661. |
| [12] | Vasquez R P;Hunt B D;Foote M C .Nonaqueous chemical etch for YBa2Cu3O7-x[J].Applied Physics Letters,1988,53(26):2692. |
| [13] | Vincenc Obo(n)a J;Chromik (S) et al.C60 films as etching masks for creation of micrometer and submicrometer YBa2Cu3O7-8 structures[J].Physica C,2006,435:37. |
| [14] | 羊恺,曾华新,刘娟秀,补世荣,罗正祥.YBCO高温超导薄膜激光化学腐蚀进程的实验观测[J].低温工程,2006(06):32-34. |
| [15] | 慕利娟,朴云龙,张晓平,赵永刚,魏斌,曹必松,江少林.氩离子刻蚀对高温超导YBCO薄膜物理特性的影响[J].低温物理学报,2006(02):134-137. |
| [16] | Tinchev S S .Application of ion beam techniques in superconducting electronics[J].Vacuum,2003,69:17. |
| [17] | 王殿生;张正平 等.高温超导多层薄膜布图布线技术[J].贵州科学,2000,18(04):241. |
| [18] | Tuohiniemil M et al.A laser-ablation system for deposition of high-temperature superconducting thin films for device applications[J].Applied Physics A,1999,69:451. |
| [19] | Hyeong-Gon Kang;Seong Kyu Kim;Haeseong Lee .The analysis of superconducting thin films modified by AFM lithography with a spectroscopic imaging technique[J].Surface Science,2006,600:3673. |
| [20] | 宫建茹,万立骏,白春礼.扫描探针纳米加工技术的现状与发展趋势[J].大学化学,2003(01):7-11. |
| [21] | Strikovski M D;Kahlmann F et al.Fabrication of YBa2Cu3O7-x thin-film flux transformers using a novel microshadow mask technique for in situ patterning[J].Applied Physics Letters,1995,66(25):3521. |
| [22] | 范世雄,许伟伟,刘庆国,吉争鸣,杨森祖,吴培亨.耐熔微掩膜法制备高温超导Josephson结[J].低温物理学报,2003(03):188-192. |
| [23] | Zhao GY.;Tohge N. .Preparation of photosensitive gel films and fine patterning of amorphous Al2O3-SiO2 thin films[J].Materials Research Bulletin: An International Journal Reporting Research on Crystal Growth and Materials Preparation and Characterization,1998(1):21-30. |
| [24] | Zhao Gao-yang;Junji Nishii et al.Orgnic-Inorganic Composite SiO2/Al2O3 Films and their fine-patterning by sol-gel process[J].Transactions of the Materials Research Society of Japan,2004,29(04):1467. |
| [25] | 赵高扬,张黄莉,薛人中.含钇螯合物制备及感光性研究[J].稀有金属,2006(z2):35-39. |
| [26] | 张卫华,赵高扬,李莺,赵卫.钛酸锶钡薄膜微细图形的制备[J].半导体学报,2006(09):1590-1594. |
| [27] | 赵高扬;薛人中;张黄莉.感光性YBCO凝胶薄膜与微细图形制备[J].低温与超导,2006(zk):41. |
| [28] | Zhao Gaoyang;Zhang Huangli;Xue Renzhong et al.Preparation of YBCO superconducting films by sol-gel process[J].Light Metals Aerospace Materials and Superconductors,2007,546-549:2007. |
| [29] | Zhao Gaoyang;Wang Zhezhe;Zhang Weihua .Fabrication of gratings using photosensitive gel films by He-Cd laser[J].Optical Engineering,2007,46(02):023401. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%