综述了太赫兹QCL(THzQCL)有源区结构设计与制备、波导结构设计和频率控制3方面的基本原理及研究进展.THzQCL有源区薄膜厚度、组分和掺杂浓度的精确控制是材料制备过程的关键.通过提高注入电流和器件温度的稳定性可以有效减小THzQCL线宽和提高频率稳定性.随着器件功率和频率特性的提升,THz QCL将在通讯、成像和谱分析等技术领域获得广泛的应用.
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