利用无压烧结工艺制备了陶瓷靶材,并借助扫描电子显微镜和液压机等测试设备研究了烧结温度对陶瓷靶材显微结构和力学性能的影响.结果表明,随着烧结温度的升高,掺杂Al2O3陶瓷靶材的晶粒尺寸逐渐增大,晶粒形状也由各向异性生长逐步向等轴状发育;靶材的抗弯强度也随着烧结温度的升高先升高后降低,并在1600℃时强度和耐磨性达到最大.
The ceramic target is prepared by pressure-less sintering method. The effects of sintering temperature on the microstructure and mechanical properties of the target are studied by SEM and the hydraulic press. The results indicate that the grain size of ceramic target with Al2O3 increase and the grain shape becomes isotropy from anisotropy gradually as the sintering temperature increase. The compressive strength of target increase firstly, then decrease with the increase of sintering temperature, and it reache a maximum at 1600℃.
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