纳米反应多层膜是指两种或两种以上不同材料按一定厚度在衬底上交替沉积形成的薄膜材料.纳米反应多层膜是一种新结构形式的纳米含能材料,可在较低的能量刺激下发生放热反应,产生的热量足以使反应区以特定的速度自持传播,具有反应瞬间完成、放热量大等特点.由于结构可自行设计以及不同于单层膜的特殊性能,纳米反应多层膜可广泛应用于微电子器件、微机械系统(MEMS)等领域.对近年来国内外纳米反应多层膜的制备方法、反应机理以及在器件应用等方面的研究进行了综述,主要分析讨论了机械加工、蒸发镀膜和磁控溅射3种制备方法的优缺点,并对今后纳米反应多层膜的研究方向及研究重点进行了展望.
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