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综述了半导体纳米薄膜热电性能表征的方法及相关的技术原理.从平行膜面和垂直膜面两方面对纳米薄膜材料热电性能3种重要参数的表征方法进行了描述;同时简要介绍了能直接测量热电优值的Harman方法的基本原理和操作过程.在此基础上指出了各方法的优缺点,并提出了今后开发检测装置需努力的方向.

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