采用化学气相沉积法制备了多壁碳纳米管（MWNTs）,并向ZnO粉体中掺入不同比例的MWNTs,利用扫描电子显微镜（SEM）对合成物进行了表征,以该合成物为敏感材料制成了旁热式结构的气体传感器,通过元件对乙醇气敏特性的测试表明,MWNTs的掺杂显著地提高了ZnO气敏材料对乙醇气体的灵敏度,当乙醇气体浓度为5.0×10-5时,元件的灵敏度为46,响应恢复时间分别为4和20s,并测试了传感器对于常见干扰气体的灵敏度,表明器件具有良好的选择性。
Multiwalled carbon nanotubes(MWNTs) were prepared by chemical vapor deposition.Then the heater-type gas sensor was made by doping MWNTs in ZnO powder.The morphology of MWNTs-doped ZnO powder was characterized by scanning electron microscope(SEM).The studies reveal that the sensitivity of ZnO gas sensor is significantly improved with the addition of MWNTs.The sensitivity of the sensor is 46 and the response and recovery times are 4 and 20s respectively when the concentration of ethanol is 5.0×10-5.It also shows the prominent selection to common interference gases.
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