采用室温磁控溅射技术在AZ91D镁合金表面制备了CNx/SiC双层薄膜(SiC为中间层),研究了界面结合情况、薄膜的力学和摩擦磨损性能.结果表明:CNx/SiC双层薄膜表面颗粒结合紧密,中间层SiC与基体和CNx层界面的结合很好,均发生了呈梯度的元素扩散,膜基附着力在12N以上;CNx薄膜具有低的纳米硬度(3.85GPa)、低的弹性模量(30.46GPa),但却具有高的硬度与弹性模量比值(0.126)以及好的摩擦磨损性能;在以氮化硅(Si3N4)球为对偶件的室温干摩擦条件下,其摩擦因数约为0.19,磨损率为4.89×10(-6)mm3·m(-1)·N(-1).
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