Sol-Gel Based Soft Lithography and Piezoresponse Force Microscopy of Patterned Pb(Zr0.52Ti0.48)03 Microstructures

材料科学技术（英文）, 2010, 26(5): 439-444.

^1, , ^2, , ^3, , ^4,

1.Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,and Faculty of Materials,Optoelectronics and Physics,Xiangtan University,Xiangtan 411105,China

2.Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,and Faculty of Materials,Optoelectronics and Physics,Xiangtan University,Xiangtan 411105,China;Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,and Faculty of Materials,Optoelectronics and Physics,Xiangtan University,Xiangtan 411105,China

3.Department of Engineering Mechanics,University of Nebraska,Lincoln,68588-0526,USA

4.Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,and Faculty of Materials,Optoelectronics and Physics,Xiangtan University,Xiangtan 411105,China

基金项目: and the Scientific Research Fund of Hunan Provincial Education Department(08C864) the Provincial Natural Science Foundation of Hunan Province, China(07JJ1008;09JJ7004) National Natural Science Foundation of China(10772155;10732100;10902095) The Asylum Research MFP-3D Atomic Force Microscope was acquired through an ARO DURIP grant(W911NF-08-01-0262) US National Science Foundation(0706100;OS)

Sol-Gel Based Soft Lithography and Piezoresponse Force Microscopy of Patterned Pb(Zr0.52Ti0.48)03 Microstructures

Lining Lan ^1, , Shuhong Xie ^2, , Li Tan ^3, , Jiangyu Li ^4,

1.Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,and Faculty of Materials,Optoelectronics and Physics,Xiangtan University,Xiangtan 411105,China

3.Department of Engineering Mechanics,University of Nebraska,Lincoln,68588-0526,USA

4.Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,and Faculty of Materials,Optoelectronics and Physics,Xiangtan University,Xiangtan 411105,China

Keywords： Soft lithography

Sol-gel based soft lithography technique has been developed to pattern a variety of ferroelectric Pb(Zr0.52Ti0.48)03 (PZT) microstructures, with feature size approaching 180 nm and good pattern trans-fer between the master mold and patterned films. X-ray diffraction and high-resolution transmission electron microscopy confirm the perovskite structure of the patterned PZT. Piezoresponse force microscopy (PFM) and switching spectroscopy piezoresponse force microscopy (SSPFM) confirm their piezoelectricity and ferroelec-tricity. Piezoresponse as high as 2.75 nm has been observed, comparable to typical PZT films. The patterned PZT microstructures are promising for a wide range of device applications.

参考文献

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Sol-Gel Based Soft Lithography and Piezoresponse Force Microscopy of Patterned Pb(Zr0.52Ti0.48)03 Microstructures

参考文献