采用超声电沉积法制备了一种铜薄膜,利用浸泡腐蚀实验、电化学测试、金相显微观察和X射线衍射分析等研究了其显微组织和耐腐蚀性.结果表明:与普通电沉积铜薄膜相比,超声电沉积铜薄膜在20%HNO3溶液中开始冒气泡的时间延迟了近2倍,腐蚀速率明显降低;在3.5%NaCl溶液中自腐蚀电位明显高于普通电沉积铜薄膜,自腐蚀电流不及后者的1/2;超声电沉积铜薄膜,晶粒明显小于普通电沉积试样;(200)晶面取向明显增强,(111)衍射峰值也有所增加,(220)取向则显著减弱;从微观上解释了超声电沉积铜薄膜具有较好耐腐蚀性能的原因.
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