用空心阴极离子镀制备了Ｔｉ（Ａｌ）Ｎ和ＴｉＮ涂层，０．５ｍｏｌ／Ｌ的Ｈ２ＳＯ４ 溶液中极化曲线结果表明，Ｔｉ（Ａｌ）Ｎ涂层的耐蚀性优于ＴｉＮ涂层。电子探针（ＥＰＭＡ）、Ｘ射 线衍射和扫描电镜等分析了Ｔｉ（Ａｌ）Ｎ涂层的元素分布特征及组织结构。
Ti(A1)N coatings were prepared by the Hollow Cathode Discharge(HCD) ion plating technology. The measurement of the corrosion rate of the coating by anode polariza- tion curve in 0. 5 mol/L H,SO, solution showed that the better anticorrosion property of Ti (A1)N coating than that of TiN coating. Analysis results of Electronic Probe Mass Analysis (EPMA 1, Scanning Electronic Microscope (SEM) and X-ray diffraction revealed that A1 was concentrated uniformly as a band at the interface between the coating and the substrate and compared with TiN coating, Ti (A1)N coating consisted of finer fibrous grains and dis- tinct denser columnar grains. Meanwhile the effect of the structure on the anticorrosion property is discussed.
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