通过磁控溅射沉积、阳极氧化与溶胶-凝胶结合的多步技术在Si(100)表面制备了HA/Al2O3复合生物涂层材料.采用TG-DSC测定了复合涂层中HA外层的烧成温度,采用XRD、FT-IR以及EDS分析了Si(100)基HA/Al2O3复合生物涂层的组成,并借助SEM研究了复合涂层的表面与截面的微观形貌.研究表明,凝胶完全转变为HA外层的最低温度约为550℃,凝胶经600℃处理30min后可在Si(100)-Al2O3基上形成具有一定数量纳米细孔且含有少量CO3的HA外层;A外层嵌入Si(100)基阳极氧化Al2O3多孔层的孔洞中构成HA/Al2O3复合生物涂层.
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