用等离子体增强磁控溅射(PEMS)方法制备了TiSiCN、TiCrSiCN和CrSiCN涂层,并在空气中进行700℃退火处理.利用扫描电子显微镜、能谱仪和X射线衍射仪表征了退火处理前后涂层的断面形貌、成分和微结构.研究了退火处理对3种涂层的硬度、韧性和膜基结合性能的影响以及它们的高温抗氧化性能.结果表明:退火处理后,TiSiCN涂层表面形成了一层均匀且较厚(1.50 μm)的富氧层;CrSiCN涂层的氧化层不均匀且富氧层较薄(0.50μm);TiCrSiCN涂层较致密,未检测到氧化物存在.3种涂层的韧性和硬度在退火后都出现不同程度的降低,硬度分别降低了20GPa(TiSiCN涂层)、9 GPa (CrSiCN涂层)和5 GPa (TiCrSiCN涂层).退火后,TiSiCN涂层与基体的结合性能有较明显的提高,TiCrSiCN涂层的膜基结合性能变化不大,CrSiCN涂层的结合性能则出现一定减弱.TiSiCN和CrSiCN涂层的脆性氧化层易产生分层和剥离,而TiCrSiCN涂层表现出最佳的高温抗氧化性能.
参考文献
| [1] | LI S Z;SHI Y L;PENG H R .Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition[J].Plasma Chemistry and Plasma Processing,1992,12(3):287-297. |
| [2] | VEPREK S;M(A)NNLING H D;KARVANKOVA P et al.The issue of the reproducibility of deposition of superhard nanocomposites with hardness of≥50 GPa[J].Surface and Coatings Technology,2006,200(12/13):3876-3885. |
| [3] | VEPREK S;ZHANG R F;VEPREK-HEIJMAN M G J et al.Superhard nanocomposites:Origin of hardness enhancement,properties and applications[J].Surface and Coatings Technology,2010,204(12/13):1898-1906. |
| [4] | PARK J H;CHUNG W S;CHO Y R et al.Synthesis and mechanical properties of Cr-Si-N coatings deposited by a hybrid system of arc ion plating and sputtering techniques[J].Surface and Coatings Technology,2004,188/189:425-430. |
| [5] | CHOI J B;CHO K;LEE M H et al.Effects of Si content and free Si on oxidation behavior of Ti-Si-N coating layers[J].THIN SOLID FILMS,2004,447//448:365-370. |
| [6] | CASTALDI L;KURAPOV D;REITER A et al.High temperature phase changes and oxidation behavior of Cr-Si-N coatings[J].Surface and Coatings Technology,2007,202(4/5/6/7):781-785. |
| [7] | ZHANG C H;LU X C;WANG H et al.Microstructure,mechanical properties,and oxidation resistance ofnanocomposite Ti-Si-N coatings[J].Applied Surface Science,2006,252(18):6141-6153. |
| [8] | 徐建华;马大衍;马胜利 等.Ti-Si-N纳米复合超硬薄膜的高温热稳定性[J].稀有金属材料与工程,2006,34(11):1778-1781. |
| [9] | MA S L;MA D Y;GUO Y et al.Synthesis and characterization of super hard,self-lubricating Ti-Si-C-N nanocomposite coatings[J].Acta Materialia,2007,55(18):6350-6355. |
| [10] | ABRAHAM S;CHOI E Y;KANG N H et al.Microstructure and mechanical properties of Ti Si-CN films synthesized by plasma-enhanced chemical vapor deposition[J].Surface and Coatings Technology,2007,202(4/5/6/7):915-919. |
| [11] | WEIR H .Plasma enhanced magnetron sputter deposition of Ti-Si-C-N based nanocomposite coatings[J].Surface and Coatings Technology,2008,203(5/6/7):538-544. |
| [12] | LI Q;JIANG F Q;LENG Y X et al.Microstructure and tribological properties of Ti(Cr)SiCN coating deposited by plasma enhanced magnetron sputtering[J].VACUUM,2013,89:168-173. |
| [13] | (C)EKADA M;MA(C)EK M;MERL D K et al.Properties of Cr(C,N) hard coatings deposited in Ar-C2H2-N2 plasma[J].THIN SOLID FILMS,2003,433(1/2):174-179. |
| [14] | BULL S J .Failure mode maps in the thin film scratch adhesion test[J].Tribology International,1997,30(7):491-498. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%