Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Plasma enhanced chemical vapor deposition (PECVD) technique is very attractive to prepare DLC coating for MEMS.This paper describes the preparation of DLC films using twinned electron cyclotron resonance (ECR) microwave PECVD process.Raman spectra confirmed the DLC characteristics of the films.Fourier-transform infrared (FT-IR)characterization indicates the carbon is bonded in the form sp3 and sp2 with hydrogen participating in bonding.The surface roughness of the films is as low as approximately 0.093nm measured with an atomic force microscope.A CERT microtribometer system is employed to obtain information about the scratch resistance,friction properties,and sliding wear resistance of the films.The results show the deposited DLC films have low friction and good scratch/wear resistance properties.
参考文献
| [1] | Wang WY.;Wang YL.;Bao HF.;Xiong B.;Bao MH. .Friction and wear properties in MEMS[J].Sensors and Actuators, A. Physical,2002(0):486-491. |
| [2] | K Deng;W H Ko.Application of Diamond-like Carbon Film for Microdynamic Device[M].Solid-State Sensor and Actuator Workshop5th Technical DigestIEEE,1992:98-101. |
| [3] | K Komvopoulos .Surface Engineering and Microtribology for Microeletromechanical Systems[J].Wear,1996,200:305-327. |
| [4] | Te-Hua Fang;Cheng-I Weng;Ming-Jeng Chiang .Effects of substrate bias on nanotribologyof a-C:H films deposited by ECR-MPCVD[J].Diamond and Related Materials,2002(9):1653-1659. |
| [5] | J P Melissa .An Investigation of the Role of Hydrogen in Ion Beam Deposited a-C:HDiamond Relat[J].Mater,1998,7:908-910. |
| [6] | Robertson .Diamond-like Amorphous Carbon[J].Material Science and Engineering,2002,R37:129-281. |
| [7] | Andrea Carlo Ferrari .Determination of bonding in diamond-like carbon by Raman spectroscopy[J].Diamond and Related Materials,2002(3-6):1053-1061. |
| [8] | J P Melissa .Energy Dependent Structure Changes in Ion Beam Deposited a-C:H[J].Diamond and Related Materials,1996,5:1407-1413. |
| [9] | S.F.Yoon;K.H.Tan .Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition[J].Diamond and Related Materials,2000(12):2024-2030. |
| [10] | Chen JY.;Wang LP.;Fu KY.;Huang N.;Leng Y.;Leng YX.;Yang P.;Wang J. Wan GJ.;Sun H.;Tian XB.;Chu PK. .Blood compatibility and sp(3)/sp(2) contents of diamond-like carbon (DLC) synthesized by plasma immersion ion implantation-deposition[J].Surface & Coatings Technology,2002(1/3):289-294. |
| [11] | Bharat Bhushan;B K Gupta;Michael H Azarian .Nanoindentation,Microscratch,Friction and Wear Studies of Coatings for Contact Recording Applications[J].Wear,1995,181-183:743-758. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%