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  4. 掺杂对类金刚石薄膜性能的影响

材料导报, 2004, 18(z2): 310-316.

掺杂对类金刚石薄膜性能的影响

王立达 1, , 刘贵昌 2, , 邓新绿 3,

1.大连理工大学化工学院,大连,116012

2.大连理工大学化工学院,大连,116012

3.大连理工大学三束改性国家重点实验室,大连,116012

关键词： 类金刚石(DLC) 掺杂 改性 性能

Influence of Dopant on Properties of Diamond-like Carbon Films

类金刚石膜具有良好的机械性能、电学性能、光学性能、摩擦学性能、热学和化学性能以及生物相容性.为了进一步挖掘并改善类金刚石膜潜在性能,人们在类金刚石膜中掺入不同元素并研究了膜性能变化.总结了掺杂对类金刚石膜性能的影响.

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