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  4. Er2O3薄膜的应用及制备方法研究进展

金属功能材料, 2011, 18(1): 76-80.

Er2O3薄膜的应用及制备方法研究进展

蒋文文 1, , 李弢 2, , 王磊 3,

1.北京有色金属研究总院超导研究中心,北京,100088

2.北京有色金属研究总院超导研究中心,北京,100088

3.北京有色金属研究总院超导研究中心,北京,100088

关键词： 氧化铒 , 薄膜 , 应用 , 制备方法 , 研究进展

Development of Application and Preparation Technology of Er2O3 Thin Films

作为稀土氧化物的一种,氧化铒具有优良的光学和电学性能,具有广阔的技术应用前景.本文综述了Er2O3薄膜的各种应用,描述了Er2O3薄膜的各种制备方法及研究现状,并对各种制备方法的优缺点进行了评述,最后对Er2O3薄膜的应用和制备方法作了总结.

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