重点介绍了目前去除SiHCl3中硼杂质的先进方法,主要有萃取法、络合物法、吸附法、部分水解法和精馏法,并展望了后续SiHC13的除硼工艺,指出应将不同的提纯工艺优化结合,建立严格科学的痕量杂质全过程技术管理控制体系,进一步优化杂质监测分析技术,才能高效、经济地去除SiHC13中的杂质.
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