采用电子束物理气相沉积(EB-PVD)技术在不锈钢基板上沉积ZrO2涂层.研究基板温度对涂层微观组织和残余应力的影响.结果表明:沉积的涂层均为t-ZrO2结构,涂层表面平整致密;随着基板温度的升高,涂层表面颗粒逐渐长大,表面粗糙度增大;涂层残余应力也随着基板温度的升高而增加,当基板温度为1000 ℃时,涂层残余应力的增量最大,ZrO2涂层的残余应力主要是由于涂层与基板热膨胀系数差别而产生的热应力引起.
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